发明授权
US4101778A Rod-shaped specimen holder for an optical corpuscular-beam apparatus
失效
用于光学球形光束装置的ROD形状样品架
- 专利标题: Rod-shaped specimen holder for an optical corpuscular-beam apparatus
- 专利标题(中): 用于光学球形光束装置的ROD形状样品架
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申请号: US722562申请日: 1976-09-13
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公开(公告)号: US4101778A公开(公告)日: 1978-07-18
- 发明人: Moriz von Rauch , Lee H. Veneklasen
- 申请人: Moriz von Rauch , Lee H. Veneklasen
- 申请人地址: DEX Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DEX Munich
- 优先权: DEX2542351 19750919
- 主分类号: H01J37/18
- IPC分类号: H01J37/18 ; H01J37/20 ; G21K5/06
摘要:
An optical corpuscular-beam apparatus including a rod-shaped specimen holder passing through a wall of the apparatus, which holder is secured in the apparatus wall by a first bearing and engages an adjustable counterbearing in the interior of the apparatus. The improvement of the invention comprises the first bearing comrising a diaphragm disposed circumferentially about the specimen holder and having an outer edge mechanically coupled to the apparatus wall.
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