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发明授权
US4151324A Piezoelectric crystalline films and method of preparing the same 失效
压电晶体薄膜及其制备方法

Piezoelectric crystalline films and method of preparing the same
摘要：
Piezoelectric crystalline films on substrate, which consist essentially of a crystalline zinc oxide film with a c-axis perpendicular to a substrate surface, containing 0.01 to 20.0 atomic percent of at least one element selected from the group consisting of iron, chromium, cobalt and nickel.
摘要（中）：

基底上的压电晶体膜，其基本上由具有垂直于衬底表面的c轴的结晶氧化锌膜组成，含有0.01至20.0原子％的选自铁，铬，钴和镍的至少一种元素 。

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