发明授权
US4220839A Induction heating coil for float zone melting of semiconductor rods
失效
用于半导体棒浮球区熔化的感应加热线圈
- 专利标题： Induction heating coil for float zone melting of semiconductor rods
- 专利标题（中）： 用于半导体棒浮球区熔化的感应加热线圈
-
申请号： US867202申请日： 1978-01-05
-
公开(公告)号： US4220839A公开(公告)日： 1980-09-02
- 发明人: Noel De Leon
- 申请人： Noel De Leon
- 申请人地址： DKX
- 专利权人： Topsil A/S
- 当前专利权人： Topsil A/S
- 当前专利权人地址： DKX
- 主分类号： H05B6/32
- IPC分类号： H05B6/32 ; H05B6/36 ; H05B5/00
摘要：
An induction heating coil for the float zone melting of semiconductor materials. The distribution of current on the surfaces of the coil is modified by altering the surfaces of the coil. The alteration of the surfaces is in the form of selectively positioned saw slots and solid conductor strips. The current distribution can be controlled independently on the top and bottom surfaces of the coil.
公开/授权文献
- US5266244A Method of forming a thin electroconductive film 公开/授权日：1993-11-30