发明授权
- 专利标题: Micromechanical display logic and array
- 专利标题(中): 微机械显示逻辑和阵列
-
申请号: US968054申请日: 1978-12-11
-
公开(公告)号: US4229732A公开(公告)日: 1980-10-21
- 发明人: Allan M. Hartstein , Kurt E. Petersen
- 申请人: Allan M. Hartstein , Kurt E. Petersen
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: H04N5/74
- IPC分类号: H04N5/74 ; G02B27/50 ; G02F1/19 ; G09F9/37 ; H01H59/00 ; G08B5/24
摘要:
A display device, addressing circuitry, and semiconductor control logic are all portions of an integrated structure formed by thin film technology on a single silicon wafer. The display comprises a thin film micromechanical electrostatic form of light reflective display formed by depositing thin films upon a silicon wafer and selectively etching to form metal-amorphous oxide micromechanical leaves deflected by applying potential thereto to provide electrostatic deflection. MOSFET devices are also formed upon the silicon wafer in juxtaposition with a plurality of micromechanical display elements. Addressing circuitry is connected to the MOSFET devices.
公开/授权文献
- US5864110A Power supply apparatus for plasma arc utilizing equipment 公开/授权日:1999-01-26