发明授权
- 专利标题: Lateral pulling growth of crystal ribbons and apparatus therefor
- 专利标题(中): 横向牵拉水晶带的生长及其设备
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申请号: US864489申请日: 1977-12-27
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公开(公告)号: US4264407A公开(公告)日: 1981-04-28
- 发明人: Taro Shudo , Bosshi Kudo , Yasushi Tamai
- 申请人: Taro Shudo , Bosshi Kudo , Yasushi Tamai
- 申请人地址: JPX Tokyo JPX Tokyo
- 专利权人: Mitsubishi Kinzoku Kabushiki Kaisha,Japan Silicon Co., Ltd.
- 当前专利权人: Mitsubishi Kinzoku Kabushiki Kaisha,Japan Silicon Co., Ltd.
- 当前专利权人地址: JPX Tokyo JPX Tokyo
- 优先权: JPX50-136841 19751114
- 主分类号: C30B15/06
- IPC分类号: C30B15/06 ; C30B15/14 ; C30B29/64 ; H01L21/208
摘要:
The lateral pulling growth of a thin and wide crystal ribbon is established by laterally pulling the crystal ribbon from the melt of a crystalline substance having the same crystal structure as that of the crystal ribbon with a gaseous cooling medium blown over the surfaces of the melt and the grown crystal.
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