Invention Grant
- Patent Title: Method of displaying an image of phase contrast in a scanning transmission electron microscope
- Patent Title (中): 在扫描透射电子显微镜中显示相位差图像的方法
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Application No.: US266290Application Date: 1981-05-22
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Publication No.: US4382182APublication Date: 1983-05-03
- Inventor: Takashi Matsuzaka , Hideo Todokoro
- Applicant: Takashi Matsuzaka , Hideo Todokoro
- Applicant Address: JPX Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JPX Tokyo
- Priority: JPX55-68969 19800526
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/244 ; H01J37/26 ; H01J37/28

Abstract:
A method of and apparatus for displaying an image of phase contrast in a scanning transmission electron microscope, in which an electron beam flux transmitted through a specimen is deflected with a high frequency and repeatedly moved on an aperture provided in a region where a transmitted electron beam and a scattered electron beam interfere, and among signal components detected by a detector through the aperture, only a signal synchronous with the high frequency is sampled and detection-rectified, whereby the difference of the intensities of the region where both the electron beams interfere is detected so as to display the image of phase contrast of the specimen.
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