发明授权
- 专利标题: Pyroelectric detector and method for manufacturing the same
- 专利标题(中): 热电探测器及其制造方法
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申请号: US190161申请日: 1980-09-23
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公开(公告)号: US4383174A公开(公告)日: 1983-05-10
- 发明人: Sadao Matsumura , Katsuyoshi Fukuta , Hitoshi Hirano
- 申请人: Sadao Matsumura , Katsuyoshi Fukuta , Hitoshi Hirano
- 申请人地址: JPX Kanagawa
- 专利权人: Tokyo Shibaura Denki Kabushiki Kaisha
- 当前专利权人: Tokyo Shibaura Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Kanagawa
- 优先权: JPX54-122947 19790925; JPX55-38043 19800325
- 主分类号: G01J5/34
- IPC分类号: G01J5/34 ; H01L37/02 ; G01J1/00
摘要:
A device for detecting infrared rays using the pyroelectric effect, namely a pyroelectric detector, and methods for manufacturing the pyroelectric detector, are disclosed. The pyroelectric detector comprises a pyroelectric material, an electrode for receiving infrared rays placed on one face of the pyroelectric material, a shield electrode placed at the other face of the pyroelectric material, a substrate made of a semiconductor or conductive material which is fastened to the shield electrode, the substrate having a hole corresponding in position to the position of the infrared receiving electrode and a stand to which the substrate is fastened. The method for manufacturing the pyroelectric detector comprises the steps of forming a shield electrode at one face of a pyroelectric wafer, making holes in a substrate, fastening the substrate to the shield electrode, grinding the other of the wafer, forming electrodes on the other face of the wafer for receiving infrared rays, the position of the electrodes corresponding to the position of the holes, and dicing the pyroelectric material between the holes to form a single pyroelectric detector.
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