发明授权
US4433235A Focusing position detecting device in optical magnifying and observing
apparatus
失效
聚焦位置检测装置在光学放大和观察装置中
- 专利标题: Focusing position detecting device in optical magnifying and observing apparatus
- 专利标题(中): 聚焦位置检测装置在光学放大和观察装置中
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申请号: US310240申请日: 1981-10-09
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公开(公告)号: US4433235A公开(公告)日: 1984-02-21
- 发明人: Nobuyuki Akiyama , Yoshimasa Ohshima , Mitsuyoshi Koizumi
- 申请人: Nobuyuki Akiyama , Yoshimasa Ohshima , Mitsuyoshi Koizumi
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX55-140610 19801009; JPX56-78096 19810525
- 主分类号: G02B21/24
- IPC分类号: G02B21/24 ; G01J1/20 ; G01J1/32
摘要:
A focusing position detecting device in which a laser beam is directed through an objective lens toward the surface of an object to form a minute spot on the surface of the object, and the beam reflected from the surface of the object is led through the objective lens again toward a concentrating point, so as to detect the focusing position of the objective lens by measuring the position of the concentrating point. In the device, a photoelectric element is provided to detect the intensity of the reflected beam, and the intensity of the laser beam is so controlled that the output of the photoelectric element is maintained constant.
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