发明授权
US4439243A Apparatus and method of material removal with fluid flow within a slot
失效
在槽内流体流动的材料去除的装置和方法
- 专利标题： Apparatus and method of material removal with fluid flow within a slot
- 专利标题（中）： 在槽内流体流动的材料去除的装置和方法
-
申请号： US404678申请日： 1982-08-03
-
公开(公告)号： US4439243A公开(公告)日： 1984-03-27
- 发明人: Stephen D. Titus
- 申请人： Stephen D. Titus
- 申请人地址： TX Dallas
- 专利权人： Texas Instruments Incorporated
- 当前专利权人： Texas Instruments Incorporated
- 当前专利权人地址： TX Dallas
- 主分类号： B05C9/12
- IPC分类号： B05C9/12 ; B05C11/08 ; B05D1/40 ; B05D3/10 ; G03F7/16 ; G03F7/30 ; G03F7/42 ; G11B5/842 ; H01L21/027 ; H01L21/30 ; B08B7/00
摘要：
Apparatus and method for cleaning material at the outer edge of an object by applying a fluid, which can be a solvent, for the material to a flat surface adjacent the edge by contact and moving the solvent onto the edge by centrifugal force. A slot is provided in a planar surface. The slot is filled with solvent for contact with the flat surface of the object. The slot is arcuate and elongated. The fluid is directed along the slot in the direction of rotation by a baffle. The slot has a bottom sloping upward toward the planar surface in the direction of rotation. A notch is provided between an edge of the planar surface and the slot to act as a spillway for excess solvent.
公开/授权文献
- US4966496A Method of erecting offshore platforms 公开/授权日：1990-10-30
信息查询
