发明授权
- 专利标题: Method for determining surface contour of piezoelectric wafers
- 专利标题(中): 确定压电晶片表面轮廓的方法
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申请号: US382425申请日: 1982-05-27
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公开(公告)号: US4446432A公开(公告)日: 1984-05-01
- 发明人: Lawrence N. Dworsky , Garth R. Kennedy
- 申请人: Lawrence N. Dworsky , Garth R. Kennedy
- 申请人地址: IL Schaumburg
- 专利权人: Motorola Inc.
- 当前专利权人: Motorola Inc.
- 当前专利权人地址: IL Schaumburg
- 主分类号: G01B7/28
- IPC分类号: G01B7/28 ; G01B7/34 ; G01N27/00
摘要:
A method utilizing a localized electrical field to precisely determine the surface contour of a substantially flat wafer of piezoelectric material having a slight convexity in its opposing faces.
公开/授权文献
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