发明授权
- 专利标题: Semiconductor pressure sensor
- 专利标题(中): 半导体压力传感器
-
申请号: US407362申请日: 1982-08-11
-
公开(公告)号: US4459855A公开(公告)日: 1984-07-17
- 发明人: Kozo Yamagami
- 申请人: Kozo Yamagami
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX56-127491 19810812
- 主分类号: G01L9/04
- IPC分类号: G01L9/04 ; G01L9/00 ; H01L29/84 ; G01L9/06
摘要:
An improved semiconductor pressure sensor of the silicon diaphragm type is disclosed. The sensor includes a pressure sensor device composed of a substrate of monocrystalline silicon, a diffused resistive layer formed on one surface of the substrate and a cavity formed in the other surface to create a thin-walled area that includes the diffused resistive layer with the cavity surrounded by a thick-walled leg portion. A hermetic sealable cap covers the one surface of the sensor device. A conductive diffused region from which an electrical signal can be picked up is provided in the leg portion electrically connected to the diffused resistive layer.
公开/授权文献
- US5611465A Automatic toilet bowl cleaner 公开/授权日:1997-03-18
信息查询