发明授权
- 专利标题: X-Ray lithography mask and method for fabricating the same
- 专利标题(中): X射线光刻掩模及其制造方法
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申请号: US513954申请日: 1983-07-15
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公开(公告)号: US4515876A公开(公告)日: 1985-05-07
- 发明人: Hideo Yoshihara , Akira Ozawa , Misao Sekimoto , Toshiro Ono
- 申请人: Hideo Yoshihara , Akira Ozawa , Misao Sekimoto , Toshiro Ono
- 申请人地址: JPX Tokyo
- 专利权人: Nippon Telegraph & Telephone Public Corp.
- 当前专利权人: Nippon Telegraph & Telephone Public Corp.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX57-124714 19820717; JPX58-112916 19830624
- 主分类号: G03F1/22
- IPC分类号: G03F1/22 ; G03F9/00
摘要:
An X-ray absorber layer in the form of single layer of high melting point metal such as Ta, W is formed with granular crystal grains on a mask substrate, so that an internal stress of the layer is reduced. A fine pattern is formed from the absorber layer by reactive sputter etching using CBrF.sub.3 gas as an etchant, so that an X-ray absorber pattern is formed on the mask substrate. The X-ray lithography mask thus fabricated has a fine pattern such as submicron pattern with a high degree of pattern contrast and a high dimensional accuracy.
公开/授权文献
- US5755802A Knee-joint endoprosthesis 公开/授权日:1998-05-26