发明授权
- 专利标题: Pressure transducer with temperature compensation circuit
- 专利标题(中): 带温度补偿电路的压力传感器
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申请号: US522227申请日: 1983-08-11
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公开(公告)号: US4556807A公开(公告)日: 1985-12-03
- 发明人: Kazuji Yamada , Hideo Sato , Kazuo Kato , Takao Sasayama , Kanji Kawakami , Ryosaku Kanzawa
- 申请人: Kazuji Yamada , Hideo Sato , Kazuo Kato , Takao Sasayama , Kanji Kawakami , Ryosaku Kanzawa
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX57-141067 19820816
- 主分类号: G01L9/04
- IPC分类号: G01L9/04 ; G01B7/16 ; G01L9/00 ; G01L9/06
摘要:
A pressure transducer is disclosed comprising a pressure sensor portion having gage resistors in bridge formed on a thin diaphragm of a semiconductor substrate, and a power supply connected to the pressure sensor portion for driving the pressure sensor. The power supply includes a first current source for supplying a temperature-dependent current equivalent to the sum of a current almost proportional to the absolute temperature and a current independent of temperature, and a second current source for sinking the current almost proportional to the temperature characteristic of the gage resistors from the current of the first current source. A temperature compensation circuit is additionally provided to drive the bridge circuit by the difference between the temperature-dependent current and the current proportional to the temperature characteristic in a constant-current driving mode, and by a voltage proportional to the current difference when the output of the bridge circuit is connected to an amplifier whose gain is dependent on temperature.
公开/授权文献
- US3992904A Non-woven fabrics 公开/授权日:1976-11-23
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