发明授权
- 专利标题: Integrated circuit isolation
- 专利标题(中): 集成电路隔离
-
申请号: US621019申请日: 1984-06-15
-
公开(公告)号: US4580330A公开(公告)日: 1986-04-08
- 发明人: Gordon P. Pollack , Clarence W. Teng , William R. Hunter , Christopher Slawinski , Robert R. Doering
- 申请人: Gordon P. Pollack , Clarence W. Teng , William R. Hunter , Christopher Slawinski , Robert R. Doering
- 申请人地址: TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: TX Dallas
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/32 ; H01L21/76 ; H01L21/762 ; H01L29/06
摘要:
An integrated circuit isolation technology wherein the nitride-sidewall methods of the prior art are improved by performing an undercut and backfill before the second nitride (the sidewall nitride which prevents encroachment) is added to the first nitride (which covers the moat areas). Thus, the butt joint between the two nitrides is made more secure, and localized bird's-beaking at the butt joint between the moat nitride and the sidewall nitride does not occur.
公开/授权文献
- US5159909A Vertical internal combustion engine with overhead valves 公开/授权日:1992-11-03