发明授权
US4594473A Substrate having at least one fine-wired conductive layer 失效
衬底具有至少一个精细布线的导电层

Substrate having at least one fine-wired conductive layer
摘要:
A fine-wired conductor for use in LSI circuits exhibits good adhesion properties. The conductor is made up of a film of metal such as chrome or titanium on an insulator such as a ceramic substrate, a gold layer over the film of metal and a palladium film on the gold layer. In addition, a palladium layer can be interposed between the metal film and the gold layer to facilitate gold plating and inhibit diffusion of the metal and the gold.
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