发明授权
- 专利标题: Substrate having at least one fine-wired conductive layer
- 专利标题(中): 衬底具有至少一个精细布线的导电层
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申请号: US587917申请日: 1984-03-09
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公开(公告)号: US4594473A公开(公告)日: 1986-06-10
- 发明人: Tatsuo Inoue , Mitsuru Kimura
- 申请人: Tatsuo Inoue , Mitsuru Kimura
- 申请人地址: JPX Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX58-40060 19830311
- 主分类号: H05K3/46
- IPC分类号: H05K3/46 ; H01B5/14 ; H01L23/498 ; H05K3/38 ; H05K1/09
摘要:
A fine-wired conductor for use in LSI circuits exhibits good adhesion properties. The conductor is made up of a film of metal such as chrome or titanium on an insulator such as a ceramic substrate, a gold layer over the film of metal and a palladium film on the gold layer. In addition, a palladium layer can be interposed between the metal film and the gold layer to facilitate gold plating and inhibit diffusion of the metal and the gold.
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