发明授权
- 专利标题： Device for measuring light incident on an optical system
- 专利标题（中）： 用于测量入射在光学系统上的光的装置
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申请号： US283233申请日： 1981-07-14
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公开(公告)号： US4595290A公开(公告)日： 1986-06-17
- 发明人: Noriyuki Nose , Kiyonobu Endo
- 申请人： Noriyuki Nose , Kiyonobu Endo
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX55-101506 19800724; JPX55-101507 19800724; JPX55-101509 19800724; JPX55-101514 19800724
- 主分类号： G02B27/10
- IPC分类号： G02B27/10 ; G03B7/099 ; G01J1/42
摘要：
This invention provides a device for measuring light incident on an optical system. This device includes an optical system defining an optical path, a beam splitter and a photo detector. The beam splitter has a relief type diffraction lattice having a plurality of semireflecting surfaces periodically arranged and included in a transparent body. The diffraction lattice is arranged to split a portion of the incident light by its effect of reflection/diffraction and its beam splitting efficiency having a predetermined distribution within the lattice area. The diffracted light from the diffraction lattice is directed to the photo detector.