发明授权
US4601806A Magnetron cathode for sputtering ferromagnetic targets 失效
用于溅射铁磁靶的磁控管阴极

  • 专利标题: Magnetron cathode for sputtering ferromagnetic targets
  • 专利标题(中): 用于溅射铁磁靶的磁控管阴极
  • 申请号: US678239
    申请日: 1984-12-05
  • 公开(公告)号: US4601806A
    公开(公告)日: 1986-07-22
  • 发明人: Peter Wirz
  • 申请人: Peter Wirz
  • 申请人地址: DEX Rodgau
  • 专利权人: Zapfe; Hans
  • 当前专利权人: Zapfe; Hans
  • 当前专利权人地址: DEX Rodgau
  • 优先权: DEX3343875 19831205
  • 主分类号: H01J23/04
  • IPC分类号: H01J23/04 H01J37/34 C23C14/34
Magnetron cathode for sputtering ferromagnetic targets
摘要:
A magnetron cathode for sputtering targets of ferromagnetic materials. A cathode ground body (2) has at least one supporting surface (4a, 4c) for the target and a magnet system (6) with magnet poles of opposite polarity cohering on the circumference, lying inside one another, and separated by a gap (5a). The target is divided by at least one air gap geometrically similar to the shape of the interval into at least two target parts (12, 13) which are staggered in the direction of the depth of the cathode on the at least one supporting surface (4a, 4c). In accordance with the invention,(a) the magnet system (6) is disposed in back of the farthest set-back supporting surface (4a) for the target (12, 13), and(b) The width "s" of the air gap (14) in the direction of the depth of the cathode is smaller than the dark space interval necessary under operating conditions.
信息查询
0/0