发明授权
- 专利标题： Contactless measurement of electrical properties of wafer shaped materials
- 专利标题（中）： 晶圆形材料电性能的非接触式测量
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申请号： US647785申请日： 1984-09-06
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公开(公告)号： US4605893A公开(公告)日： 1986-08-12
- 发明人: Norman Braslau
- 申请人： Norman Braslau
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： G01R33/20
- IPC分类号： G01R33/20 ; G01N24/10 ; G01R27/04 ; G01R31/302 ; G01R33/60
摘要：
Absolute electrical parameter values using reflected microwaves are achieved through measurement of a sample that completely fills the cross section of the waveguide. A test sample holder for a wafer shaped sample employs a choke flange type plate and a backing plate for the wafer. Semiconductor sheet resistivity and mobility values are measured.
公开/授权文献
- US5766980A Method of manufacturing a solid state imaging device 公开/授权日：1998-06-16