发明授权
- 专利标题： Method of making thin film device
- 专利标题（中）： 制造薄膜器件的方法
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申请号： US716604申请日： 1985-03-27
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公开(公告)号： US4624045A公开(公告)日： 1986-11-25
- 发明人: Shinichiro Ishihara , Takashi Hirao , Koshiro Mori , Masaharu Ono , Masatoshi Kitagawa
- 申请人： Shinichiro Ishihara , Takashi Hirao , Koshiro Mori , Masaharu Ono , Masatoshi Kitagawa
- 申请人地址： JPX Kadoma
- 专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人： Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址： JPX Kadoma
- 优先权： JPX56-152751 19810926
- 主分类号： H01L31/042
- IPC分类号： H01L31/042 ; H01L23/535 ; H01L27/142 ; H01L31/0224 ; H01L31/04 ; H01L31/20 ; H01L31/18 ; H01L27/14
摘要：
A thin film device such as an amorphous thin film solar battery is easily made with high integration by use of metal-diffused regions in the thin film as an electrical connection region across the thickness of the thin film. By use of such metal-diffused regions 24, 24 . . . for connection between transparent stripe shaped electrodes 21', 21'. . . disposed between glass substrate 20 and amorphous silicon thin film 23 and stripe shaped metal electrodes 25, 25 . . . on the top surface of the thin film 23, series connected solar battery cells can be made with a small number of process steps.
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