发明授权
US4637253A Semiconductor flow detector for detecting the flow rate and flowing
direction of fluid
失效
用于检测流体的流速和流动方向的半导体流量检测器
- 专利标题: Semiconductor flow detector for detecting the flow rate and flowing direction of fluid
- 专利标题(中): 用于检测流体的流速和流动方向的半导体流量检测器
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申请号: US733796申请日: 1985-05-14
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公开(公告)号: US4637253A公开(公告)日: 1987-01-20
- 发明人: Masayuki Sekimura , Shunji Shirouzu
- 申请人: Masayuki Sekimura , Shunji Shirouzu
- 申请人地址: JPX Kawasaki
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX59-103028 19840522; JPX59-103030 19840522
- 主分类号: G01F1/698
- IPC分类号: G01F1/698 ; G01F1/68 ; G01P5/10
摘要:
Disclosed is a semiconductor flow detector, comprising a semiconductor flow detecting element including a heating element and a pair of temperature-measuring elements formed in the substrate, a detecting element for detecting the temperature of the fluid under measurement, a first driving circuit for heating the heating element to keep the temperature of the semiconductor flow detecting element higher by a prescribed level than the temperature of the fluid under measurement, an electric power detection circuit for detecting the electric power flowing through the heating element so as to generate an electric power detection signal, a second driving circuit for driving the pair of the temperature-measuring elements, a temperature difference detecting circuit for detecting the temperature difference between the pair of the temperature-measuring elements so as to generate a temperature difference signal, and an arithmetic circuit for performing prescribed arithmetic operations among the electric power detection signal and the temperature difference signal so as to determine the flow rate and flowing direction of the fluid.
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