发明授权
- 专利标题: Ion source apparatus
- 专利标题(中): 离子源装置
-
申请号: US689943申请日: 1985-01-09
-
公开(公告)号: US4641031A公开(公告)日: 1987-02-03
- 发明人: Yasuyuki Ito , Toru Sugawara
- 申请人: Yasuyuki Ito , Toru Sugawara
- 申请人地址: JPX Kawasaki
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX59-22732 19840213
- 主分类号: H01J27/10
- IPC分类号: H01J27/10 ; H01J27/14 ; H01J27/00
摘要:
An ion source apparatus comprising a bulk type thermionic cathode, which, when heated, emits thermoelectrons; an anode for causing a gas discharge in cooperation with the cathode thereby producing plasma; a grid electrode for extracting ions out of the plasma; a magnetic member for confining the plasma within a prescribed region; and a ferromagnetic body which surrounds the thermionic cathode. The ferromagnetic body removes the lines of magnetic force produced by magnets from the neighborhood of the surface of the thermionic cathode. As a result, thermoelectrons are freely emitted from the thermionic cathode, thereby ensuring a stable gas discharge.
公开/授权文献
- US5132640A Differential current amplifier circuit 公开/授权日:1992-07-21
信息查询