发明授权
- 专利标题： Detector for use for measuring dimensions of an object
- 专利标题（中）： 用于测量物体尺寸的检测器
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申请号： US634791申请日： 1984-07-26
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公开(公告)号： US4663588A公开(公告)日： 1987-05-05
- 发明人: Kiyoshi Himuro , Akihisa Narimatsu , Katsutoshi Mibu , Takamoto Yoshioka
- 申请人： Kiyoshi Himuro , Akihisa Narimatsu , Katsutoshi Mibu , Takamoto Yoshioka
- 申请人地址： JPX Tokyo
- 专利权人： Sony Magnescale Incorporation
- 当前专利权人： Sony Magnescale Incorporation
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX58-137205 19830727; JPX58-151882 19830819; JPX58-160921 19830901
- 主分类号： G01D5/243
- IPC分类号： G01D5/243 ; G01D5/247 ; G01B7/02
摘要：
A detector head for use in a measuring device includes a plurality of constituent measuring elements arranged in at least two blocks, each block producing an output signal of equal amplitude, and a phase shifter provided to shift the relative phases of the output signals of the blocks to have a predetermined relative phase difference, whereby selected higher-order harmonic components are cancelled from the resultant signal formed by summing the signals produced by the separate blocks of constituent elements.
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