Invention Grant
- Patent Title: Method of controlling supersaturated injection and concentration of exotic atoms into deep portions of a solid with a high energy electron beam
- Patent Title (中): 通过高能电子束控制过饱和注入和将外来原子浓缩成固体的深部的方法
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Application No.: US776150Application Date: 1985-09-13
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Publication No.: US4670291APublication Date: 1987-06-02
- Inventor: Hirotaro Mori , Hiroshi Fujita
- Applicant: Hirotaro Mori , Hiroshi Fujita
- Applicant Address: JPX Suita
- Assignee: Osaka University
- Current Assignee: Osaka University
- Current Assignee Address: JPX Suita
- Priority: JPX59-208304 19841005
- Main IPC: C22C21/00
- IPC: C22C21/00 ; C22C1/00 ; C22F1/04 ; C22F3/00 ; C23C8/10 ; C23C8/60 ; C23C10/28 ; C23C12/02 ; C23C14/48 ; C23C26/00 ; H01L21/263 ; B05D3/06
Abstract:
A method of controlling supersaturated injection of exotic atoms comprises previously preparing a parent material buried by exotic phases consisting Ge or Si, irradiating the parent material with the electron beams, and forming supersaturated injection regions of the exotic atoms to control the concentration profile of the exotic atoms. The method can control the distribution of concentration of exotic atoms by irradiating with electron beams of high energy.
Public/Granted literature
- US5939359A Herbicidal pyrazine derivatives Public/Granted day:1999-08-17
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