发明授权
- 专利标题: Non-contact electro-optical displacement follower
- 专利标题(中): 非接触式电光位移跟随器
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申请号: US668878申请日: 1984-10-31
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公开(公告)号: US4682221A公开(公告)日: 1987-07-21
- 发明人: Iwao Yamazaki , Yuji Nakamichi , Keizo Abe , Tatsuya Okudera
- 申请人: Iwao Yamazaki , Yuji Nakamichi , Keizo Abe , Tatsuya Okudera
- 申请人地址: JPX Tokyo
- 专利权人: Ya-man Ltd.
- 当前专利权人: Ya-man Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX58-41555 19830315; JPX58-53735 19830331
- 主分类号: G01D5/26
- IPC分类号: G01D5/26 ; H04N7/18
摘要:
This invention relates to a non-contact electro-optical displacement follower which captures the image of a target or device under test optically, converts the said image into an electron image by optical-electrical conversion, and measures displacement. It forms a variable voltage which moves the electron image on the displayer to the desired location and can be applied to each deflection coil (8, 9) by arranging a variable voltage generator (18h, 18v) attached to each deflection coil so that the set-up and adjustment of the equipment and measurement preparations can be performed easily. Moreover, this equipment possesses a displayer (A1, A2, A3, A4) to indicate which position (up, down, right or left) the electron image moved due to the variable voltage, in spite of the fact that the electron image may be damaged temporarily if adjustment is excessive. Additionally, a non-contact electro-optical displacement follower of this invention can be equipped with a Light Servo circuit (27, 28) whose frequency response will eliminate effectively any optical noise changing in high speed. It also comes equipped with operation instructions to advise operators directions for each mode the equipment is in, as well as the mode to follow (KD, CPU, I).
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