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US4687560A Method of synthesizing a plurality of reactants and producing thin films of electro-optically active transition metal oxides 失效
合成多种反应物并制造电光活性过渡金属氧化物薄膜的方法

Method of synthesizing a plurality of reactants and producing thin films
of electro-optically active transition metal oxides
摘要:
A method of synthesizing electro-optically active reaction products from a plurality of reactants by inducing a reaction by plasma deposition among the reactants. The plasma reaction is effective for consolidating the reactants and producing thin films of electro-optically active transition metal oxides.
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