发明授权
- 专利标题: Thermal head and method for manufacture thereof
- 专利标题(中): 热敏头及其制造方法
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申请号: US790415申请日: 1985-10-23
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公开(公告)号: US4709243A公开(公告)日: 1987-11-24
- 发明人: Masakazu Kato , Takehiro Takoshima
- 申请人: Masakazu Kato , Takehiro Takoshima
- 申请人地址: JPX
- 专利权人: Alps Electric Co., Ltd.
- 当前专利权人: Alps Electric Co., Ltd.
- 当前专利权人地址: JPX
- 优先权: JPX59-221244 19841023
- 主分类号: H01C7/00
- IPC分类号: H01C7/00 ; B41J2/335 ; H01L49/02 ; G01D15/10
摘要:
A thermal head having a heat-generating resistor layer, a power feeding conductor layer, and a protective layer superposed on an electrically insulating layer, acquires improved quality by forming the heat-generating resistor layer with an alloy consisting of tantalum, a high-melting metal, and nitrogen. The thermal head of improved quality is produced by spattering a composite target consisting of tantalum and the high-melting metal in a mixed gas consisting of nitrogen and argon.The high-melting metal is at least one member selected from the group consisting of titanium, zirconium, hafnium, vanadium, niobium, chromium, molybdenum, and tungsten.
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