发明授权
US4709243A Thermal head and method for manufacture thereof 失效
热敏头及其制造方法

Thermal head and method for manufacture thereof
摘要:
A thermal head having a heat-generating resistor layer, a power feeding conductor layer, and a protective layer superposed on an electrically insulating layer, acquires improved quality by forming the heat-generating resistor layer with an alloy consisting of tantalum, a high-melting metal, and nitrogen. The thermal head of improved quality is produced by spattering a composite target consisting of tantalum and the high-melting metal in a mixed gas consisting of nitrogen and argon.The high-melting metal is at least one member selected from the group consisting of titanium, zirconium, hafnium, vanadium, niobium, chromium, molybdenum, and tungsten.
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