发明授权
- 专利标题: Process for removing triorganophosphine from an organic liquid
- 专利标题(中): 从有机液体中除去三有机膦的方法
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申请号: US762028申请日: 1985-08-02
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公开(公告)号: US4710587A公开(公告)日: 1987-12-01
- 发明人: David R. Bryant , Richard A. Galley
- 申请人: David R. Bryant , Richard A. Galley
- 申请人地址: CT Danbury
- 专利权人: Union Carbide Corp.
- 当前专利权人: Union Carbide Corp.
- 当前专利权人地址: CT Danbury
- 主分类号: C07C45/50
- IPC分类号: C07C45/50 ; C07F9/02 ; C07F9/50 ; C07C45/80
摘要:
A process for selectively removing alkyl substituted phosphine from an organic liquid containing same and triarylphosphine by treating said liquid with phosphoric acid.
公开/授权文献
- US5759914A Method for forming interconnection in semiconductor device 公开/授权日:1998-06-02
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