Invention Grant
- Patent Title: Method of measuring shape of object in non-contacting manner
- Patent Title (中): 以非接触方式测量物体形状的方法
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Application No.: US784501Application Date: 1985-10-04
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Publication No.: US4721388APublication Date: 1988-01-26
- Inventor: Yusuke Takagi , Yoshio Kojima , Kazuo Moriguti , Tsunehiko Takakusagi
- Applicant: Yusuke Takagi , Yoshio Kojima , Kazuo Moriguti , Tsunehiko Takakusagi
- Applicant Address: JPX Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JPX Tokyo
- Priority: JPX59-208244 19841005
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01B11/00 ; G01B11/03
Abstract:
This invention relates to a method of measuring the shape of an object in a non-contacting manner. The method comprises the steps of providing reference points on the object, the coordinates of which are known in an object coordinate system for expressing the shape of the object; applying a light spot on the reference points while moving a light spot detecting sensor to determine the coordinate values in a measuring coordinate system; determining the relative positional relation between the two coordinate systems by using coordinate values thus determined and the coordinate values in the object coordinate system; measuring points on the object to measure the shape of the object; and comparing the coordinate values, relating to shape of the object and determined in the measuring coordinate system, with reference values which are design values modulated with the relative positional value and converted into coordinate values in the measuring coordinate system in an arithmetic control unit, whereby a manufacturing error of said object is measured.
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