发明授权
US4738693A Valve block and container for semiconductor source reagent dispensing
and/or purification
失效
用于半导体源试剂分配和/或净化的阀块和容器
- 专利标题: Valve block and container for semiconductor source reagent dispensing and/or purification
- 专利标题(中): 用于半导体源试剂分配和/或净化的阀块和容器
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申请号: US117207申请日: 1987-11-04
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公开(公告)号: US4738693A公开(公告)日: 1988-04-19
- 发明人: Glenn M. Tom
- 申请人: Glenn M. Tom
- 申请人地址: CT New Milford
- 专利权人: Advanced Technology Materials, Inc.
- 当前专利权人: Advanced Technology Materials, Inc.
- 当前专利权人地址: CT New Milford
- 主分类号: B01D53/04
- IPC分类号: B01D53/04 ; B01D53/14 ; B01D53/18 ; F16K27/02
摘要:
A valve block leak-tightly joinable to a receptacle to form a container suitable for liquid storage/vapor dispensing, and gas purification applications. The valve block is provided with first and second valve ports with which valves may be employed to flow feed gas through the valve block and receptacle. To effect purging the valve block ports and gas flow passages, the valve block is provided with a purge valve port which may be opened while the first and second valve ports are closed, to remove dead space hold-up gas from the respective ports and flow passages of the block prior to initiation of vapor dispensing or gas purification operation. The disclosed container is particularly advantageous for dispensing or purifying source reagent compounds for elements of Group III and Group V, in semiconductor manufacturing applications.
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