Invention Grant
US4772786A Photothermal oscillator force sensor 失效
光热振荡器力传感器

Photothermal oscillator force sensor
Abstract:
A sensor comprises a beam, e.g. of silicon, which resonates at a frequency dependent on the force imposed on the beam. Light on a line induces resonance of the beam by means of the photothermal effect. The light reflected from the beam is amplitude modulated at the resonance frequency, and returns along the line. It is reflected by a semi-reflecting plane mirror onto a lens which focusses it onto a photodetector. The photodetector produces an output voltage modulated at the oscillation frequency, and is thus representative of the force imposed on beam 1.
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