发明授权
- 专利标题: Pyrolytic boron nitride crucible and method for producing the same
- 专利标题(中): 热解氮化硼坩埚及其制造方法
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申请号: US866823申请日: 1986-05-22
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公开(公告)号: US4773852A公开(公告)日: 1988-09-27
- 发明人: Hiroaki Tanji , Masaharu Suzuki
- 申请人: Hiroaki Tanji , Masaharu Suzuki
- 申请人地址: JPX Tokyo
- 专利权人: Denki Kagaku Kogyo Kabushiki Kaisha
- 当前专利权人: Denki Kagaku Kogyo Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX60-125230 19850611; JPX60-125231 19850611
- 主分类号: C04B35/583
- IPC分类号: C04B35/583 ; C23C16/34 ; C30B15/10 ; C30B23/06 ; F27B14/10
摘要:
A pyrolytic boron nitride crucible is provided. The crucible contains at least five wall layers consisting of first and second wall layers. The thickness of each of the first wall layers is 5 to 100 microns and the thickness of each of the second wall layers is 1/50 to 1/1 of that of the first wall layer. The total thickness of the entire wall layers is 0.5 to 3 mm. The first wall layer is bonded to and laminated alternately with the second wall layer.
公开/授权文献
- US5926819A In-line triggers 公开/授权日:1999-07-20
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