Invention Grant
- Patent Title: Source replenishment device for vacuum deposition
- Patent Title (中): 用于真空沉积的源补充装置
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Application No.: US863331Application Date: 1986-05-15
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Publication No.: US4776299APublication Date: 1988-10-11
- Inventor: Ronald A. Hill
- Applicant: Ronald A. Hill
- Applicant Address: DC Washington
- Assignee: The United States of America as represented by the United States Department of Energy
- Current Assignee: The United States of America as represented by the United States Department of Energy
- Current Assignee Address: DC Washington
- Main IPC: C23C14/24
- IPC: C23C14/24
Abstract:
A material source replenishment device for use with a vacuum deposition apparatus. The source replenishment device comprises an intermittent motion producing gear arrangement disposed within the vacuum deposition chamber. An elongated rod having one end operably connected to the gearing arrangement is provided with a multiarmed head at the opposite end disposed adjacent the heating element of the vacuum deposition apparatus. An inverted U-shaped source material element is releasably attached to the outer end of each arm member whereby said multiarmed head is moved to locate a first of said material elements above said heating element, whereupon said multiarmed head is lowered to engage said material element with the heating element and further lowered to release said material element on the heating element. After vaporization of said material element, second and subsequent material elements may be provided to the heating element without the need for opening the vacuum deposition apparatus to the atmosphere.
Public/Granted literature
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Information query
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