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US4792668A Apparatus for detecting focusing state of objective lens 失效
用于检测物镜的聚焦状态的装置

Apparatus for detecting focusing state of objective lens
摘要:
An apparatus for detecting a focusing state of an objective lens comprises optical means for forming light intensity distributions of object images whose relative positional relationship changes with the focusing state of the objective lens, sensing means having a plurality of sensors for sensing the light intensity distributions to produce first and second signals relating to the light intensity distributions, signal processing means for relatively displacing the first and second signals by determining correlation information and producing a signal for adjusting the focusing state of the objective lens in accordance with the correlation information, and altering means for altering a displacement range within which the first and second signals are relatively displaced.
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