发明授权
- 专利标题: Apparatus for measuring crystal diameter
- 专利标题(中): 用于测量晶体直径的装置
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申请号: US109722申请日: 1987-10-19
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公开(公告)号: US4794263A公开(公告)日: 1988-12-27
- 发明人: Nobuo Katsuoka , Yoshihiro Hirano , Atsushi Ozaki , Masahiko Baba
- 申请人: Nobuo Katsuoka , Yoshihiro Hirano , Atsushi Ozaki , Masahiko Baba
- 申请人地址: JPX Tokyo
- 专利权人: Shinetsu Handotai Kabushiki Kaisha
- 当前专利权人: Shinetsu Handotai Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX61-257674 19861029
- 主分类号: C30B15/26
- IPC分类号: C30B15/26 ; G01B11/08 ; H01L21/18
摘要:
An apparatus for measuring the diameter of a crystal in which an optical sensor scans along a sensing line which crosses at one point a luminous ring formed at the interface between a crystalline rod and a melt; the picture element position corresponding to a maximum luminance is discriminated when the optical sensor scans; the mean value of the picture element position is calculated over at least one revolution of the crystalline rod; and the diameter D of the crystalline rod at a portion thereof interfacing with the melt is calculated from the mean value and the level of the melt. Similarly, the minimum crystal diameter can be calculated by obtaining the picture element position corresponding to the minimum crystal diameter instead of obtaining the mean of the picture element position.
公开/授权文献
- USD434202S Coin redemption apparatus 公开/授权日:2000-11-21