发明授权
- 专利标题： Process for preparing photoelectromotive force member
- 专利标题（中）： 光电动元件制备工艺
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申请号： US938996申请日： 1986-12-08
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公开(公告)号： US4798809A公开(公告)日： 1989-01-17
- 发明人: Masaaki Hirooka , Shunichi Ishihara , Junichi Hanna , Isamu Shimizu
- 申请人： Masaaki Hirooka , Shunichi Ishihara , Junichi Hanna , Isamu Shimizu
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX60-277004 19851211
- 主分类号： H01L31/04
- IPC分类号： H01L31/04 ; H01L31/0392 ; H01L31/075 ; H01L31/20 ; H01L31/18 ; H01L21/20
摘要：
An improved photoelectromotive force member having desired photoelectric conversion layer prepared by the use of a substance capable of contributing to form a deposited film and an electronically oxidizing agent in the absence of a plasma. A process and an apparatus for preparing the same.
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