A high-frequency-discharge excited gas laser is provided, which is adapted to excite a laser gas by applying of a high frequency voltage to electrodes. In order to increase the output capacity of the high-frequency-discharge excited gas laser without sacrificing its virtues of small size, high efficiency and good beam mode, the laser, in its one aspect, has its metallic electrode (1) covered with a dielectric layer (2), with the dielectric layer being detached from the electrode. In another aspect, a pair of metallic films are laid positions diametrically opposite to each other on the outer surface of a laser tube formed of a dielectric pipe.