发明授权
- 专利标题: Sensor
- 专利标题(中): 传感器
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申请号: US948409申请日: 1986-12-30
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公开(公告)号: US4816888A公开(公告)日: 1989-03-28
- 发明人: Junichi Tanaka , Masaya Hijikigawa
- 申请人: Junichi Tanaka , Masaya Hijikigawa
- 申请人地址: JPX Osaka
- 专利权人: Sharp Kabushiki Kaisha
- 当前专利权人: Sharp Kabushiki Kaisha
- 当前专利权人地址: JPX Osaka
- 优先权: JPX59-112736 19840531
- 主分类号: G01N27/00
- IPC分类号: G01N27/00 ; G01N27/12 ; G01N27/22 ; G01N27/414 ; H01L29/78 ; H01L29/66
摘要:
A sensor having an electrode structure which comprises a lamination of at least two layers composed of a titanium layer bound to an insulating grounding layer and a nobel metal layer covering said titanium layer.