发明授权
- 专利标题： Non-destructive energy beam activated conductive links
- 专利标题（中）： 非破坏性能量束激活导电连接
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申请号： US29192申请日： 1987-03-23
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公开(公告)号： US4835118A公开(公告)日： 1989-05-30
- 发明人: Robert E. Jones, Jr. , Lee Kammerdiner , Michael R. Reeder
- 申请人： Robert E. Jones, Jr. , Lee Kammerdiner , Michael R. Reeder
- 申请人地址： CO Colorado Springs
- 专利权人： INMOS Corporation
- 当前专利权人： INMOS Corporation
- 当前专利权人地址： CO Colorado Springs
- 主分类号： H01L21/263
- IPC分类号： H01L21/263 ; H01L21/268 ; H01L21/768 ; H01L23/525
摘要：
A process of manufacturing selectively restructurable conductive links between circuit elements and corresponding spare elements on a semiconductor. A continuous green light laser directed at a non-conductive amorphous region in the links causes the region to recrystallize. This makes the link electrically conductive thereby joining the circuit elements to a corresponding spare element on the semiconductor. The method permits for high density packing of circuit elements and creates a link without producing bulk material movement.
公开/授权文献
- US5944502A Weapon stimulator 公开/授权日：1999-08-31