Invention Grant
- Patent Title: Atomic-absorption sputtering chamber and system
- Patent Title (中): 原子吸收溅射室和系统
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Application No.: US799918Application Date: 1985-11-20
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Publication No.: US4845041APublication Date: 1989-07-04
- Inventor: Thomas J. Scuitto , Theodore J. Scuitto , Al E. Bernhard
- Applicant: Thomas J. Scuitto , Theodore J. Scuitto , Al E. Bernhard
- Applicant Address: OR Grants Pass
- Assignee: Analyte Corporation
- Current Assignee: Analyte Corporation
- Current Assignee Address: OR Grants Pass
- Main IPC: G01N21/64
- IPC: G01N21/64 ; G01N21/31 ; G01N21/67
Abstract:
Gas from angled jets in a conical array bounces off the sample in a high-pressure stream, effectively centered in a duct leading to an optical-measurement chamber. A glow discharge, in the high-pressure zone where gas hits the sample, provides effective sample bombardment. Pulsed high-energy presputtering quickly bares the sample interior for analysis. Dislodged atoms flow with the gas (whose centering keeps an arrestor recess clear or obviates the need for a recess) to the measurement chamber, where the stream is bent into a long path for coaxial measurement viewing. To lessen turbulence losses, a contoured guide leads the stream into the coaxial path. The stream can be split into two opposed substreams to double the absorption pathlength. Discharge current is adjusted to use a linear part of the absorbance curve; or servocontrolled to hold absorbance at an ideal value--the current itself serving as an index of concentration. A water-cooled cathode plate firmly contacts the front of the sample (around the sputter area). The arrestor is mounted resiliently: it too makes firm sample contact. Servocontrol of gas pumping and/or supply rate stabilizes pressure, absorbance, or both. Emission is monitored to normalize (or prevent) sputtering-rate variations. A baffle in the optical chamber deters atomic coating of end windows.
Public/Granted literature
- US5145958A Process for the preparation of 2,4- or 2,6-dihalogeno-aniline Public/Granted day:1992-09-08
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