发明授权
- 专利标题: Semiconductor laser of a refractive index-guided type and a process for fabricating the same
- 专利标题(中): 折射率导向型半导体激光器及其制造方法
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申请号: US225454申请日: 1988-07-28
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公开(公告)号: US4852110A公开(公告)日: 1989-07-25
- 发明人: Hiroaki Fujii , Kenichi Kobayashi
- 申请人: Hiroaki Fujii , Kenichi Kobayashi
- 申请人地址: JPX Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX62-189839 19870728
- 主分类号: H01S5/00
- IPC分类号: H01S5/00 ; H01S5/227 ; H01S5/323
摘要:
A semiconductor laser of a refractive index-guided type comprises a GaAs (100) substrate having a mesa of (011) orientation thereon, a buffer layer grown on the top surface and side walls of the mesa of the GaAs (100) substrate and having a mesa on the top surface, a first cladding layer grown on the buffer layer in compliance with the outline on the top surface of the buffer layer having the mesa so that a mesa is provided, an active layer grown on the first cladding layer and separated on the side walls of the mesa of the first cladding layer, and a second cladding layer grown on the active layer, a boundary surface of which is in contact through a separated portion of the active layer with a boundary surface of the first cladding layer, wherein the first and second cladding layer are of a semiconductor material selected from AlGaInP and AlInP, and of a forbidden energy bandgap larger than that of the active layer. The semiconductor laser as described above is fabricated by a single etching process and a single and common metalorganic vapor phase epitaxy.
公开/授权文献
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