发明授权
- 专利标题： Low temperature intrinsic gettering technique
- 专利标题（中）： 低温内在吸气技术
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申请号： US190721申请日： 1988-05-05
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公开(公告)号： US4861126A公开(公告)日： 1989-08-29
- 发明人: Mindaugas F. Dautartas , Alain S. Harrus , Edward P. Martin, Jr. , Fred A. Stevie
- 申请人： Mindaugas F. Dautartas , Alain S. Harrus , Edward P. Martin, Jr. , Fred A. Stevie
- 申请人地址： NJ Murray Hill
- 专利权人： American Telephone and Telegraph Company, AT&T Bell Laboratories
- 当前专利权人： American Telephone and Telegraph Company, AT&T Bell Laboratories
- 当前专利权人地址： NJ Murray Hill
- 主分类号： G02B6/13
- IPC分类号： G02B6/13 ; G02F1/035 ; G02F1/313 ; H01L21/322
摘要：
Ionic drift in integrated optical devices is reduced by the utilization of a gettering layer interposed between the surface dielectric and the electrodes. The material used to form this layer is capable of gettering the mobile ions at a relatively low temperature (for example
公开/授权文献
- US4412694A Clamping devices particularly useful as pipe couplings 公开/授权日：1983-11-01
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