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US4866287A Optical surface waviness measuring apparatus 失效
光学表面波纹测量仪

Optical surface waviness measuring apparatus
摘要:
A surface waviness measuring apparatus for specularly reflecting surfaces has a light source (22) and an optical system (23) which directs a light beam (24) obliquely onto the surface (14), with the light beam (24) forming a small primary light bead (12) there. A spherical concave mirror (11) is arranged at the angle of reflection (.alpha.) with the center of curvature (13) of the spherical concave mirror being arranged closely adjacent the small primary light bead (12) on the reflecting surface (14). A photoreceiver arrangement (16) is located at the angle of reflection of the light beam (15) reflected from the concave mirror (11).
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