发明授权
- 专利标题: Electron microscope image output method and apparatus
- 专利标题(中): 电子显微镜图像输出方法和装置
-
申请号: US137691申请日: 1987-12-24
-
公开(公告)号: US4873440A公开(公告)日: 1989-10-10
- 发明人: Nobufumi Mori , Takayuki Katoh , Tetsuo Oikawa , Yoshiyasu Harada , Junji Miyahara
- 申请人: Nobufumi Mori , Takayuki Katoh , Tetsuo Oikawa , Yoshiyasu Harada , Junji Miyahara
- 申请人地址: JPX Kanagawa JPX Tokyo
- 专利权人: Fuji Photo Film Co., Ltd.,Jeol Ltd.
- 当前专利权人: Fuji Photo Film Co., Ltd.,Jeol Ltd.
- 当前专利权人地址: JPX Kanagawa JPX Tokyo
- 优先权: JPX61-311125 19861226
- 主分类号: H01J37/22
- IPC分类号: H01J37/22 ; H01J37/26
摘要:
In a system for outputting an electron microscope image, a two-dimensional sensor for storing electron beam energy thereon is exposed to an electron beam passing through a specimen in a vacuum to have the electron beam energy stored on the two-dimensional sensor, and is then exposed to light or heat to release the stored energy as light emission. The emitted light is photoelectrically detected to obtain image signals, and an electron beam image of the specimen is output on the basis of the image signals. The specimen is divided into a plurality of divisions, and the storage of the electron beam energy is carried out for each of the divisions. The image signals obtained at the divisions are combined to form composite image signals that represent an overall specimen image formed by a group of the divisions, and the image signals at the divisions are corrected so that signal values of the boundary areas of adjacent divisions become approximately equal to each other.
公开/授权文献
信息查询