发明授权
- 专利标题: Electron microscope equipped with scanning tunneling microscope
- 专利标题(中): 电子显微镜配有扫描隧道显微镜
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申请号: US260525申请日: 1988-10-21
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公开(公告)号: US4874945A公开(公告)日: 1989-10-17
- 发明人: Kimio Ohi
- 申请人: Kimio Ohi
- 申请人地址: JPX Tokyo
- 专利权人: Jeol Ltd.
- 当前专利权人: Jeol Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX62-267880 19871023
- 主分类号: G01N23/00
- IPC分类号: G01N23/00 ; G01B7/34 ; G01N37/00 ; G01Q30/02 ; G01Q60/10 ; G01Q60/16 ; G01Q70/04 ; H01J37/20 ; H01J37/26
摘要:
An electron microscope equipped with a scanning tunneling microscope. The electron microscope comprises a holder, a scanning tunneling microscope scanner having a tip, and a shift mechanism. A sample is fixed inside the holder that is mounted between the upper pole piece and the lower pole piece of an objective lens. The shift mechanism moves the scanner in two directions parallel to the surface of the sample and in a direction vertical to the sample surface. The tip is poised above a desired portion of the sample by driving the shift mechanism while observing the tip and either a reflection electron microscope image or a transmission electron microscope image of the sample. Then, the scanner uses the tip to scan the sample surface to obtain a scanning tunneling microscope image.
公开/授权文献
- US5471854A Accumulator for an air conditioning system 公开/授权日:1995-12-05