A chip type piezoelectric device includes an element body formed of cofired ceramic material and having at least a pair of excitation electrodes opposed to each other with a portion of the element body interposed therebetween. At least the portion interposed between the excitation electrodes has piezoelectricity imparted thereto, whereby this portion serves as a vibrating portion. Of the pair of excitation electrodes at least one excitation electrode is positioned in the interior of the element body, and the element body is formed with a cavity only on the side of this interiorly positioned excitation electrode away from the vibrating portion.