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US4885134A Sputtering target and method of preparing the same 失效
溅射靶材及其制备方法

Sputtering target and method of preparing the same
摘要:
Highly uniform alloy targets are prepared by melting together predetermined amounts of terbium iron and cobalt with an additional element selected from platinum, chromium, nickel, palladium, tantalum, hafnium or mixtures thereof in an argon atmosphere and casting the thus formed melt into a mold.
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