发明授权
- 专利标题: Video detection system
- 专利标题(中): 视频检测系统
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申请号: US313651申请日: 1989-02-21
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公开(公告)号: US4896206A公开(公告)日: 1990-01-23
- 发明人: Munroe Denham
- 申请人: Munroe Denham
- 申请人地址: OR Portland
- 专利权人: Electro Science Industries, Inc.
- 当前专利权人: Electro Science Industries, Inc.
- 当前专利权人地址: OR Portland
- 主分类号: H01L21/68
- IPC分类号: H01L21/68
摘要:
A video detection system detects the edge line of a microcircuit component that is to be trimmed by a laser trimming apparatus. The components (46, 48, 50, 52) to be trimmed are darker than the substrate (44) upon which the components are formed. The system generates a video signal corresponding to the image of the part (26) that carries the circuit. The brightness level of a selected point in the video signal is monitored. The position of the selected point corresponds to a point on the part image and is adjustable to be aligned with the point where the laser beams (24) contacts the surface of the part (26). The image is moved relative to the selected point, and as the edge of the relatively darker component to be trimmed crosses the selected point, the corresponding change in the monitored brightness level provides an indication that the edge of the component has been detected. Also provided is an alignment symbol for superimposition on the displayed image. The selected point (90) is incorporated into the alignment symbol. The alignment symbol is preferably cross hairs (88). The symbol brightness level is automatically adjustable to contrast with the brightness level of the portions of the part image over which the symbol is superimposed.
公开/授权文献
- US5693027A Adaptor top 公开/授权日:1997-12-02
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