发明授权
- 专利标题: Surface contour measuring tracer
- 专利标题(中): 表面轮廓测量示踪剂
-
申请号: US235360申请日: 1988-08-23
-
公开(公告)号: US4899456A公开(公告)日: 1990-02-13
- 发明人: Hideo Morita , Kenji Abiko , Katsuaki Anzawa
- 申请人: Hideo Morita , Kenji Abiko , Katsuaki Anzawa
- 申请人地址: JPX Tokyo
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX62-210426 19870824; JPX62-210427 19870824
- 主分类号: G01B5/012
- IPC分类号: G01B5/012
摘要:
The present invention relates to a surface contour measuring tracer permitting a probe element to move in the directions of X-, Y- and Z-axes. A support structure includes a base supporting thereon an X-slider and a Y-slider which are movable in the directions of X- and Y-axes, respectively. A Z-slider is supported on the X-slider so to be movable in the direction of a Z-axis. Supported on the Z-slider is a probe element, the movements of which in the directions of X-, Y- and Z-axes are permitted by the movements of the X-, Y- and Z-sliders. The X- and Y-sliders are normally held at neutral positions by a wire spring extending in the direction of the Z-axis, and the Z-slider is permitted to move in the direction of the Z-axis against the action of a coil spring and normally held at a neutral position.
公开/授权文献
信息查询