A method of heating a quartz glass tube with microwaves, which method comprises supplying a gas for plasma generation in the quartz glass tube, applying microwaves to the quartz glass tube so as to generate a hot plasma in the quartz glass tube and to preheat the quartz glass tube, and then discontinuing the supply of the gas for plasma generation while applying the microwaves, whereby the quartz glass tube absorbs the microwaves to heat the quartz glass tube to a sufficient temperature in a very quick and clear manner.